???? ???? ????? ???? ????? ?? ???????? ????? ????? ??????? ??????? ???????? ????? ?????? ??: ?????? ?????????? - ????????? - ????? ?????????? ?????????? - ???????. ????? ?????????? ???? ??? ????? ????? ??????? ??????? ??????? ???????? ?? ??? ??? ????? ???? ???? ?? ???? ???? ????? ??????????? ?????? ????? ???????? ????? ?? ?????? ??????. ????? ????? ???? ????? ???? ???? ????? ????? 40?? ????? ?????????? ????? ??????? ??????? ?????? ??????? ????? ??? ?? ????? ???? ????? ????? ??? ??????? ????? BUE? ??????? ???????? ?????. ????? ?? ?? ???? ?? ????? ?????????? ?????? ??? ????? ?????? ?????? ??????? ????? ???? decarburized ????? ???? ????? ??? ??????? ?????? ??? ???????? ?? ??????. ????? ????? ??? ??????? ?? ?????? ??? ????? ?? ?????? ??????? ???? ?????? ???? ??????.

?????? ?????????? ???? ???? ??? ?? ????? ???? ????? ??? ???? ????? ?????? ????? ????? ????? ??????? ???? ???? ?? ???? ????? ????? ??? ??? ????. ?????? ?????????? ?????? ???? ???? ??????? ?????? ?????? ???? ?? ????? ?????????? ????? ???????. ?????? ???????? ???? ??????? ?????? ???? ???? ?????? ????? ????? ???????? ??????? ???? ?????? ?? ????? ????? ?????. ??? ???? ?????? ?????? ???????? ?? ?????? ?????????? ???? ?? ???? ????? ?????? ?? ???? ???? ??? ?? ??? ??????? ??????? ???? ????? ?????????? ????? ????? ???? ?????? ?????.

??????? ????? ?? ??????? ?????? ????? ????? ????? ????? ????? ????? ??????? ?????????? (????? ????? HTCVD)? ?? ????? ????? ?? ?????? ???? ???? ?????? ?H2 ?????? CH4? N2? TiCl4? AlCl3? CO2 ?????? ?? ??????? ?? ???????? ???? ?????? ???????? ????? ??? ???? ??? ??? ?????? ???? ????? ????? ?????? ???? ????? ?????? ??????? ??? ???? ????? ????? (???? 1000 ~ 1050 ℃ ℃) ?? ??? ???? ?????? ??? ???? ??? ???? ?????? ???????? ??? (C? N) ?? AL2O3? ?? ???? ????. ???????? PCVD (????? ??????? ?????????? ????????) ????? ????? ??? ?? ????? ??? ????? ?????? ????? ???? ???? ??????? ???? ??????? (700 ???? ~ 800 ????)? ???? ?? ??? ??????? ???? ???? ??? ?? ??? ??? ???? ????? ???? ??????.

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oS2 ??? ???? ???.